High Purity Fused Quartz Boat for Semiconductor
- Product Item : HYRD-QC04
- Category： Quartz Carriers
- Material: High purity fused quartz
- Dimension: Standard or Customized
- Surface: Polished /Transparent
- Application: Semiconductor
High Purity Fused Quartz Boat for Semiconductor
Semiconductor quartz boat is a commonly used tool in electronic industry production, mainly used for transporting materials in high-temperature environments. Its main material is quartz, which has high temperature resistance, corrosion resistance and other characteristics, so it has a wide range of applications in some specific scenarios.
Firstly, in the preparation and processing of semiconductor materials, the vapor deposition technology of semiconductors is required, and in this process, quartz boats are used to load materials and place them in reaction furnaces for processing.
Secondly, due to its low sensitivity to pollutants during heating and good stability and durability, it has become one of the ideal choices in this field.
In addition, quartz boats are easy to clean and can quickly return to their optimal state, thereby improving production efficiency and quality levels.
Semiconductor quartz boat is a commonly used tool in electronic industry production, mainly used for transporting materials in high-temperature environments. Its main material is quartz, which has high temperature resistance, corrosion resistance and other characteristics, so it has a wide range of applications in some specific scenarios.
Firstly, in the preparation and processing of semiconductor materials, the vapor deposition technology of semiconductors is required, and in this process, quartz boats are used to load materials and place them in reaction furnaces for processing.
Secondly, due to its low sensitivity to pollutants during heating and good stability and durability, it has become one of the ideal choices in this field.
In addition, quartz boats are easy to clean and can quickly return to their optimal state, thereby improving production efficiency and quality levels.
Density:
2.2g/cm3
Compressive strength:
1100Mpa
Bending strength:
67Mpa
Tensile strength:
48Mpa
Poisson's ratio:
0.14-0.17
Young's modulus:
72000Mpa
Stiffness modulus:
31000Mpa
Mohs hardness:
5.5-6.5
Deformation point:
1120℃
Softening point:
1680℃
Annealing point:
1210℃
Specific heat (20-350℃):
670J/kg.℃
Thermal conductivity (20℃):
1.4W/m.℃
Thermal expansion coefficient:
5.5x10-7cm/cm.℃
Hot working temperature:
1700-2000℃
Short term usage temperature:
1300℃
Long term use temperature:
1100℃
Resistivity:
7x107Ω.cm
Insulation strength:
250-400Kv/cm
Dielectric constant Ɛ:
3.7-3.9
Dielectric absorption coefficient:
<4x104
Dielectric loss coefficient:
<1x104
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