Cleaning and saturation treatment of quartz boats
1. Cleaning of the quartz boat: put the quartz boat into hydrofluoric acid with a concentration of 10% to 25% for 40min to 120min, then put it into the spray tank and spray it with pure water, and the spray time is 20min to 90min;
2. Drying after cleaning: dry the quartz boat with a gas desiccant (such as nitrogen);
3. Saturation of the quartz boat: Put the quartz boat into a tubular diffusion furnace with a furnace temperature of 800 to 900 ℃, and introduce oxygen and a flow rate of 1000 to 3000ml/min of phosphorus oxychloride liquid source, in which the flow ratio of oxygen and Phosphorus oxychloride liquid source is 1:1～5;
4. Finally, cool the quartz boat with nitrogen or oxygen of 10-30L/min.
The above cleaning and saturation treatment method has the following significant beneficial effects:
2. Drying after cleaning: dry the quartz boat with a gas desiccant (such as nitrogen);
3. Saturation of the quartz boat: Put the quartz boat into a tubular diffusion furnace with a furnace temperature of 800 to 900 ℃, and introduce oxygen and a flow rate of 1000 to 3000ml/min of phosphorus oxychloride liquid source, in which the flow ratio of oxygen and Phosphorus oxychloride liquid source is 1:1～5;
4. Finally, cool the quartz boat with nitrogen or oxygen of 10-30L/min.
The above cleaning and saturation treatment method has the following significant beneficial effects:
The silica fume precipitate on the quartz boat cleaned by hydrofluoric acid is loosened, and then put into the spray tank to spray with pure water to completely remove the loose silica fume precipitate. Then, with the help of the large flow of phosphorus oxychloride liquid source and oxygen passing through the saturation process, the quartz boat grooves with "dead corners" can fully absorb phosphorus atoms. When the quartz boat is carrying the silicon wafer for the first time for diffusion, there will be no slot printing, thus ensuring the quality of the quartz boat.
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